Gerald's Journal

Nanofabrication

Thin Film Deposition

Physical Vapor Deposition (PVD)

Denton Explorer: E-beam Evaporator
Cressington 108: Sputter Coater

Chemical Vapor Deposition (CVD)

Etching

Dry Etch

Oxford Endpoint: Reactive Ion Etcher (RIE)

Packaging

Dicing

Disco (DAD 3361): Automatic Dicing Saw

Characterization

Microscopy

Electron

Hitachi SU-8230: FE-SEM

Optical

Leica DVM6: Digital Microscope

Spectroscopy

Infrared

Nicolet 6700: Fourier Transform Infrared Spectrometer (FTIR)

Nicolet iS5: Fourier Transform Infrared Spectrometer (FTIR)

X-Ray

Niton FXL: X-ray Fluorescence Spectrometer (XRF)

Visible

Avantes: UV-Vis Spectrophotometer

Thin Film Measurement

Profilometry

Filmetrics Profilm3D: Optical Profilometer

Ellipsometry

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